Defect Metrology
200mm Sheet or Patterned wafers measured for defects.
- Wafers measured on KLA2139 brightfield, AITxp or SP-1 defect measurement tool.
- Defect Review with Optical Microscope and SEM images provided for defect classification.
- 90nm Device Fab Yield Engineer classifications of defects based on fab's defect library.
- Sample Report available by request, or login to download
- EDX chemical constituent analysis available
- AFM defect morphology analysis available
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