Please Inquire about 300mm Metrology Services

300mm Metrology Services available, please inquire for more information.

AITxp with SEM review on Patterned Wafers

300mm Defect Capture and Review on Cu, W or STI wafers. Report with 50 classified optical and SEM images included.

  • EDX chemical constituent analysis available
  • Atomic Force Microscope (AFM) defect morphology analysis available.

Thin Film Measurement

KLA F5x measurement services

  • Provides correlation, qualification or general thin film measurement support