Veeco Vx 200mm Atomic Force Profilometry
- High resolution dishing and erosion measurements from industry standard tool set.
200mm Sheet or Patterned wafers measured for defects.
- Wafers measured on KLA2139 brightfield, AITxp or SP-1 defect measurement tool.
- Defect Review with Optical Microscope and SEM images provided for defect classification.
- 90nm Device Fab Yield Engineer classifications of defects based on fab’s defect library.
- Sample Report available by request, or login to download
- EDX chemical constituent analysis available
- AFM defect morphology analysis available
Measurement of the resistance and capacitance for metalized wafers.
- Report with all data summarized graphically.
- Report grouping is configurable by the customer.
- Probe cards and recipes available for all Silyb pattern wafers, inquire for other pattern wafer designs
- Contact us for sample reports, or login to download.
Measurement services for transparent film stacks or metal films.