AITxp with SEM review on Patterned Wafers
300mm Defect Capture and Review on Cu, W or STI wafers. Report with 50 classified optical and SEM images included.
- EDX chemical constituent analysis available
- Atomic Force Microscope (AFM) defect morphology analysis available.
Please Inquire about 300mm Metrology Services
300mm Metrology Services available, please inquire for more information.
Thin Film Measurement
KLA F5x measurement services
- Provides correlation, qualification or general thin film measurement support